The Automatic Phosphoric Acid Cleaner for Sapphire Substrate consists of an LD feeding area, cleaning area, manipulator, ULD, and other components. It features automatic heating with a constant temperature and circulation device, ultrasonic cleaning, a spray fast-discharge bubbling overflow device, and a pipeline and electrical control system. The equipment is PLC-controlled and includes functions such as adjustable cleaning time, cleaning completion alerts, temperature control, high/low liquid level alarms, overflow protection, and leakage detection alarms.
Product Parameters
Production Flow:
Manual Load → Spray Tank → Acid Cleaning Tank 1 → Acid Cleaning Tank 2 → Acid Cleaning Tank 3 → Acid Cleaning Tank 4 → HOF Tank → QDR Tank 1 → QDR Tank 2 → QDR Tank 3 → Manual Unload.
Main Materials:
Metal frame + PP shell. Tanks are made of PPN, PTFE, or PVDF.
Transportation:
Robotic arm transportation.
Product Features and Applications
Designed to clean sapphire substrates.
Contaminant Removal:
Effectively removes organic and inorganic contaminants and particles.
Surface Smoothing:
Uses chemical corrosion to smooth the surface and reduce defects.
Improved Adhesion:
Prepares the surface to enhance adhesion for subsequent film deposition.
Defect Reduction:
Minimizes surface defects to improve product quality.
Product Details
Cleaning Process:
Phosphoric Acid Solution:
Chemical cleaning using a phosphoric acid solution.
Temperature Control:
Precise temperature regulation to ensure optimal results.
Ultrasonic-Assisted Cleaning:
Enhances cleaning effectiveness with ultrasonic technology.
Automation:
Fully automatic operation reduces human error and increases efficiency.
Advantages
Efficient:
Automated operation improves cleaning efficiency.
Consistent Results:
Ensures uniform cleaning across batches.
Environmentally Friendly:
Reduces chemical usage and wastewater discharge.
Application Scenarios
◇ In March 2025, the Automatic Phosphoric Acid Cleaner for Sapphire Substrate was commissioned and began operation at the customer site for Ningxia JSG.
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