The Inserting Cleaning Unit is a customized piece of equipment specially designed for automatic wafer cleaning. Automatic wafer separation is achieved through an automatic separating mechanism. After separation, a manipulator transfers the cassette into the cleaner. Once cleaning is complete, a robot moves the cassette to the overturning positioning platform (horizontal placement) of the sorting machine. After cleaning, the robot places the empty cassette onto the cassette return line, which transports it back to the feeding position of the separating machine. Workers only need to ensure that silicon wafers are loaded into the feeding groove of the separating machine.
The main production line of the cleaning machine consists of 16 working positions. Its working principle utilizes mechanical vibration with strong ultrasonic penetration to impact the silicon wafer surface, combined with the chemical decontamination effect of the cleaning agent, to remove impurities such as silicon carbide, silicon powder, metal powder, oil stains, and suspended liquids from the wafer surface, resulting in clean silicon wafers.
The key components of the cleaner's electrical control system are made of imported high-quality parts, ensuring reliable performance, a long service life, and a position memory function. The gantry cart operates smoothly, with fast and reliable movement. An air suction outlet is installed on the top to prevent air pollution, and the user must connect an external air duct for exhaust.
Product Parameters
Loading & Soaking → Ultrasonic Cleaning → Alkali Cleaning 1 → Alkali Cleaning 2 → Alkali Cleaning 3 → Alkali Cleaning 4 → Rinsing 1 → H2O2 Cleaning → Rinsing 2 → Rinsing 3 → Rinsing 4 → Rinsing 5 → Dehydrating → Hot Air Drying 1 → Hot Air Drying 2 → Hot Air Drying 3 → Unloading & Cooling
Product Features and Applications
Designed for separating and cleaning wafers.
Product Details
Easy to operate and maintain
Energy-efficient
Highly automated
Reduces wafer fragmentation rate
Application Scenarios
In May 2025, the equipment will be shipped to Reliance, India.
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